Apparatus for spinning a microelectronic substrate

Details Apparatus for spinning a microelectronic substrate Apparatus for spinning a microelectronic substrate

1974-09-12

1977-01-04

Envall, Jr., R. N.

Electricity: motive power systems

Reciprocating or oscillating motor

310 15, 310 36, H02K 3300

Patent

active

040016595

ABSTRACT:
In the manufacture of semiconductor components thin films of submicron thickness are in widespread use. To produce the submicron thick films free of entrapped pockets of air, a platform, to which a substrate surface is mounted, is initially caused to oscillate in a shaking motion to produce a shearing force to lift minute pockets of air trapped at the liquid-substrate interface to permit migration to the surface of the liquid where they escape. This initial oscillating operation is provided by a permanent magnet A-C motor driven as a synchronous motor by the output of a frequency generator. The motor control circuit, including the frequency generator, energizes the A-C motor to initially cause the oscillating motion of the platform (chuck) carrying the substrate surface. After the initial time period of oscillating motion, the control circuit provides a high frequency signal to the motor for high speed rotation in one direction to produce a drying action to the thin, film-forming liquid. The particular motor construction provides mounting the substrate surface on a vacuum chuck with the output shaft holding the chuck provided with a liquid slinger to prevent excess production liquid from draining into the motor housing.

REFERENCES:
patent: 3475629 (1969-10-01), Lagier

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