Coating processes – Centrifugal force utilized
Patent
1996-04-03
2000-03-07
Padgett, Marianne
Coating processes
Centrifugal force utilized
427299, 438782, 438780, B05D 312, H01L 21469
Patent
active
060337281
ABSTRACT:
The invention relates to an apparatus for spin coating for forming a resist film, an SOG film, a polyimide film, and the like in manufacturing semiconductor devices and has the object of forming a coated film with a specified and uniform thickness even in case that an amount of discharged coating solution is a little. An apparatus for spin coating of the invention comprises a rotatable table for placing a wafer, a coating solution discharging means which is set above the rotatable table and discharges a coating solution on the surface of the wafer, and a solvent discharging means which is above the rotatable table and discharges a solvent capable of dissolving the coating solution.
REFERENCES:
patent: 4393807 (1983-07-01), Fujimura
patent: 4510176 (1985-04-01), Cuthbert et al.
patent: 4564280 (1986-01-01), Fukuda
patent: 4668334 (1987-05-01), Doornveld
patent: 4685975 (1987-08-01), Kottman et al.
patent: 4688918 (1987-08-01), Suzuki et al.
patent: 4850299 (1989-07-01), Merullo et al.
patent: 4982694 (1991-01-01), Moriyama
patent: 4989345 (1991-02-01), Gill, Jr.
patent: 5089305 (1992-02-01), Ushijima et al.
patent: 5094884 (1992-03-01), Hillman et al.
patent: 5127362 (1992-07-01), Iwatsu et al.
patent: 5250114 (1993-10-01), Konishi et al.
patent: 5366757 (1994-11-01), Lin
patent: 5646071 (1997-07-01), Lin et al.
patent: 5658615 (1997-08-01), Hasebe et al.
patent: 5688555 (1997-11-01), Teng
patent: 5705223 (1998-01-01), Bunkofske
patent: 5780105 (1998-07-01), Wang
patent: 5874202 (1999-02-01), Ortho
patent: 5902399 (1999-05-01), Courtenay
patent: 5939139 (1999-08-01), Fujimoto
patent: 5940651 (1999-08-01), Pike et al.
Search Report for G.B application 9,409,655.9.
Japanese Abstract of patent No. 3-76109 of Apr. 1991 by Toshiro Tsumori vol. 52 E 1080.
Kikuchi Kenji
Muramatsu Tomoaki
Fujitsu Limited
Padgett Marianne
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