Apparatus for simultaneously processing a plurality of substrate

Details Apparatus for simultaneously processing a plurality of substrate Apparatus for simultaneously processing a plurality of substrate

1978-06-06

1980-01-29

Pianalto, Bernard D.

Coating apparatus

With vacuum or fluid pressure chamber

With means to apply electrical and/or radiant energy to work...

118319, 118320, B44D 134, C23F 134, C23F 144

Patent

active

041855850

ABSTRACT:
An apparatus for simultaneously processing a plurality of substrates comprises at least one novel chamber wherein at least one processing step is performed. Each chamber contains a plurality of spindles each having a substrate receiving surface upon which a substrate may be placed. Each of the spindles is at a different height from the floor of the chamber. Preferably the spindles are aligned in a single row according to height. Further, the chamber is provided with means for dispensing processing materials thereinto. The apparatus further comprises means for delivering a plurality of substrates to and from the processing chamber.

REFERENCES:
patent: 3974797 (1976-08-01), Hutson
patent: 4008683 (1977-02-01), Rose
patent: 4030622 (1977-06-01), Brooks et al.

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