Apparatus for simultaneously measuring the thickness of, and the

Details Apparatus for simultaneously measuring the thickness of, and the Apparatus for simultaneously measuring the thickness of, and the

1995-07-31

1997-04-29

McGraw, Vincent P.

Optics: measuring and testing

With plural diverse test or art

356440, G01N 2159

Patent

active

056254490

ABSTRACT:
A portion of a surface of a sample body is arranged to receive an incident optical beam having an optical intensity I.sub.0. On an opposing surface of the sample body is located an optical detector which senses the intensity I of the resulting optical radiation emerging from the opposing surface of the sample body. In order to measure the thickness t of the sample body, a thickness gauge is located either at another portion of the surface of the sample body or on the optical detector.

REFERENCES:
patent: 3414725 (1968-12-01), Evans
patent: 4023909 (1977-05-01), Ross
patent: 5028787 (1991-07-01), Rosenthal et al.

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