Apparatus for silicon nitride precursor solids recovery

Details Apparatus for silicon nitride precursor solids recovery Apparatus for silicon nitride precursor solids recovery

1992-08-06

1995-04-04

Santiago, Amalia L.

Chemical apparatus and process disinfecting, deodorizing, preser

Physical type apparatus

Means separating or dissolving a material constituent

55269, 55456, 261 93, 366104, 366149, 422129, 422225, 422226, 422242, B01D 4508, B01D 4510

Patent

active

054035635

ABSTRACT:
Method and apparatus are provided for collecting reaction product solids entrained in a gaseous outflow from a reaction situs, wherein the gaseous outflow includes a condensable vapor. A condensate is formed of the condensable vapor on static mixer surfaces within a static mixer heat exchanger. The entrained reaction product solids are captured in the condensate which can be collected for further processing, such as return to the reaction situs. In production of silicon imide, optionally integrated into a production process for making silicon nitride caramic, wherein reactant feed gas comprising silicon halide and substantially inert carrier gas is reacted with liquid ammonia in a reaction vessel, silicon imide reaction product solids entrained in a gaseous outflow comprising residual carrier gas and vaporized ammonia can be captured by forming a condensate of the ammonia vapor on static mixer surfaces of a static mixer heat exchanger.

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