Apparatus for servicing of semiconductor manufacturing equipment

Material or article handling – Self-loading or unloading vehicles – With load-receiving portion – or significant section thereof,...

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296 27, 414470, B65G 6702

Patent

active

051865971

ABSTRACT:
A mobile container cart includes a pivoting mechanism for pivoting the container from a horizontal position to approximately 85-90 degree vertical position. The container rests atop the cart and has removable side and top plates. A semiconductor processing equipment assembly is loaded into the container while still hot. The container is sealed and pivoted to its vertical position for transport. Once at a servicing area, the container is repositioned horizontally and the top and side plates are removed. The cart now functions as a work bench for disassembling, servicing and reassembling the device. Diagnostics can be performed while the device is in the service area.

REFERENCES:
patent: 2976033 (1961-03-01), Martin
patent: 3149878 (1964-09-01), Heermann
patent: 3173708 (1965-03-01), Machielse et al.
patent: 3837702 (1974-09-01), Case
patent: 3930680 (1976-01-01), Littlefield
patent: 3937502 (1976-02-01), Gay
patent: 3955845 (1976-05-01), Werner
patent: 4932639 (1990-06-01), Fjellstrom
patent: 5016935 (1991-05-01), Semple

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