Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1981-04-14
1983-10-25
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Diaphragm
73DIG4, 73727, 338 4, G01L 906
Patent
active
044111584
ABSTRACT:
An apparatus for sensing the condition of a pressurized fluid including a semiconductor chip having a diaphragm portion adapted for exposure to the pressurized fluid and an adjacent terminal portion adapted for connection to external circuitry for providing a measurement of the condition of the fluid. The semiconductor chip has sensing elements formed within the diaphragm portion and conductor elements in electrical contact with the sensing elements formed within and extending from the diaphragm portion to the terminal portion. A fluid barrier is provided for isolating the diaphragm portion from the terminal portion to prevent the terminal portion from being exposed to the pressurized fluid, while permitting pressurized fluid to contact the diaphragm portion so that the condition of the pressurized fluid can be sensed.
REFERENCES:
patent: 3455165 (1969-07-01), Huet
patent: 3762208 (1973-10-01), Bice et al.
patent: 3764950 (1973-10-01), Wallia
patent: 3820401 (1974-06-01), Lewis
patent: 3918019 (1975-11-01), Nunn
patent: 3930412 (1976-01-01), Mallon
patent: 3968466 (1976-07-01), Nakamura
patent: 4023562 (1977-05-01), Hynecek
patent: 4125820 (1978-11-01), Marshall
patent: 4204185 (1980-05-01), Kurtz
patent: 4291293 (1981-09-01), Yamada
Ametek Inc.
Woodiel Donald O.
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