Apparatus for semiconductor wafer identification

Details Apparatus for semiconductor wafer identification Apparatus for semiconductor wafer identification

1994-07-25

1996-10-22

Hajec, Donald T.

Registers

Coded record sensors

Particular sensor structure

235385, G06K 710

Patent

active

055679277

ABSTRACT:
The apparatus (10) includes a batch wafer presentation system (12) receiving a cassette (14) carrying a plurality of wafers (16). The batch wafer presentation system (12) arranges the plurality of wafers (16) along an inclined presentation axis, .alpha., to simultaneously expose the bar code inscription on each wafer (16). A laser scanner (30) is mounted on an arm assembly (32) which travels long a track (34) parallel with the presentation axis. The laser scanner (30) is mounted such that its angular and spatial positions relative to the plurality of wafers (16) may be easily adjusted.

REFERENCES:
patent: 5155888 (1992-10-01), Lau
patent: 5287414 (1994-02-01), Foster
Thomas Chisholm, et al., "Backside Wafer Identification Using BC 412* Bar Code", Computer Identics Corporation, Sep. 1, 1992, pp. 1-17.
Author unknown, "Scanstar 10W Intelligent Miniature Bar Code Scanner for Semiconductor Wafer Identification", Computer Identics, printed in USA May 1991, pp. 1-2.
Author unknown, "Specification for Back Surface Bar Code Marking of Silicon Wafers", SEMI TI-93 SEMI 1993, pp. 1-9.

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