Apparatus for semiconductor chip detachment

Metal working – Means to assemble or disassemble – Means to disassemble electrical device

Reexamination Certificate

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Details

C029S721000, C029S743000, C029S832000, C029S426100, C156S583200

Reexamination Certificate

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10843826

ABSTRACT:
An apparatus and method is provided for detaching a semiconductor chip from an adhesive tape on which it is mounted. The apparatus comprises a platform adapted to contact the adhesive tape at a position of the chip and a retaining force generator coupled to the platform for drawing the adhesive tape in a direction away from the chip. An elevation device is projectable from the platform that is movable both laterally across a surface of the platform and vertically with respect to the platform for elevating the chip. By moving the elevation device across a width of the chip while lifting the chip, controlled lifting of the chip and propagation of delamination between the chip and the adhesive tape may be achieved.

REFERENCES:
patent: 4296542 (1981-10-01), Gotman
patent: 4778362 (1988-10-01), Hoffmann
patent: 6123800 (2000-09-01), Freund
patent: 6165310 (2000-12-01), Freund
patent: 6202292 (2001-03-01), Farnworth
patent: 6290805 (2001-09-01), Freund
patent: 6386815 (2002-05-01), Tawara
patent: 6505395 (2003-01-01), Farnworth
patent: 6555418 (2003-04-01), Kurosawa
patent: 6561743 (2003-05-01), Nakatsu
patent: 6629553 (2003-10-01), Odashima
patent: 6658718 (2003-12-01), Farnworth
patent: 6889427 (2005-05-01), Yee et al.

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