Apparatus for scrubbing substrate

Details Apparatus for scrubbing substrate Apparatus for scrubbing substrate

1994-09-07

1995-11-14

Roberts, Jr., Edward L.

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 884, 134 6, B08B 1102, B08B 302

Patent

active

054654475

ABSTRACT:
Improved method and apparatus for scrubbing a substrate are provided, the method including the step of scrubbing one face of the substrate with a cylindrical rotary brush while applying back pressure to the substrate by jetting a fluid for generating back pressure against the other face of the substrate.

REFERENCES:
patent: 5092011 (1992-03-01), Gommori et al.

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