Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1985-05-28
1987-04-28
Anderson, Bruce C.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250398, 250396ML, H01J 37317, H01J 3704
Patent
active
046617124
ABSTRACT:
Normal or constant angle scanning of a target with high current ion beam is provided by positioning a space charge lens between a beam deflection system and the target. The space charge lens is positioned such that its focal point coincides with the virtual center of deflection. The space charge lens steers the scanned beam into parallel paths so as to maintain a constant angle of incidence upon the workpiece. In an electrostatic deflection system, two sets of y-axis deflection plates can be axially positioned on opposite sides of the x-axis deflection plates to provide a single virtual center of deflection. The apparatus is useful for performing ion implantation with higly uniform dose distribution.
REFERENCES:
patent: 3319110 (1967-05-01), Schlesinger
patent: 3585397 (1971-06-01), Brewer
patent: 3676693 (1972-07-01), Guernet
patent: 3723733 (1973-03-01), Seliger et al.
patent: 4019989 (1977-04-01), Hazewindus et al.
patent: 4101813 (1978-07-01), Parker et al.
patent: 4117339 (1978-09-01), Wolfe
patent: 4283631 (1981-08-01), Turner
patent: 4287419 (1981-09-01), Booth
patent: 4367411 (1983-01-01), Hanley et al.
patent: 4449051 (1984-05-01), Berkowitz
Mobley et al, IEEE Trans. Nucl. Sci., vol. NS-26, No. 3 (Jun. 1979) pp. 3112-3114.
Booth et al, Nucl. Instrum. Methods, vol. 151 (1978) pp. 143-147.
Thomson, J. Vac. Sci. Technol., vol. 12, No. 6, (Nov./Dec. 1975), pp. 1156-1159.
Keller, Radiation Effects, vol. 44, (1979) pp. 71-80.
Keller et al, Nucl. Instrum. Methods, vol. 139 (1976) pp. 41-45.
Anderson Bruce C.
Berman Jack I.
Cole Stanley Z.
Dooher Terrence E.
McClellan William R.
LandOfFree
Apparatus for scanning a high current ion beam with a constant a does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus for scanning a high current ion beam with a constant a, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for scanning a high current ion beam with a constant a will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-478879