Apparatus for retaining wafers

Coating apparatus – Work holders – or handling devices – Gripper or clamped work type

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

118730, 269238, 269254R, 279 1D, B05C 1300

Patent

active

050404849

ABSTRACT:
A device for releaseably holding a workpiece includes a resilient collet which is attached to a base by an elastomeric member. Typically, the collet is an annular ring. Several fingers for holding the workpiece extend from the collet. The fingers are pivoted by actuating a member which elastically deforms the collet and causes the fingers to pivot from a position for engaging the workpiece to a position for releasing the workpiece and vice-versa. In one application, the base is a platen for supporting a wafer in a semiconductor processing system, and a plurality of the holding devices are arranged around the periphery of a rotating disk. A counterweight ring is attached to the collet to counterbalance the moment generated by the centrifugal force of the wafer pressing against the fingers as the disk is rotated.

REFERENCES:
patent: 2337329 (1943-12-01), Hewlett
patent: 2448881 (1948-09-01), Glynn
patent: 2686681 (1954-08-01), Nyland
patent: 2864332 (1958-12-01), Woolley
patent: 2865643 (1958-12-01), Parker et al.
patent: 3159395 (1964-12-01), Mussett et al.
patent: 3191952 (1965-06-01), Morawski
patent: 3340176 (1967-09-01), Belluso et al.
patent: 3566960 (1971-03-01), Stuart
patent: 3598083 (1971-08-01), Dort et al.
patent: 3625384 (1971-12-01), Boerger et al.
patent: 3645581 (1972-02-01), Lasch, Jr. et al.
patent: 3700250 (1972-10-01), Bautz
patent: 3721210 (1973-03-01), Helms et al.
patent: 3874525 (1975-04-01), Hassan et al.
patent: 3921572 (1975-11-01), Brunner et al.
patent: 3977955 (1976-08-01), Nevis et al.
patent: 3983838 (1976-10-01), Christensen
patent: 4068814 (1988-01-01), Anthony et al.
patent: 4094722 (1978-06-01), Yamamoto et al.
patent: 4228358 (1980-10-01), Ryding
patent: 4261762 (1981-04-01), King
patent: 4282924 (1981-08-01), Faretra
patent: 4306731 (1981-12-01), Shaw
patent: 4311427 (1982-01-01), Coad et al.
patent: 4313266 (1987-03-01), Tam
patent: 4344383 (1982-08-01), Salt, Jr.
patent: 4447049 (1984-05-01), Rudy
patent: 4473455 (1984-09-01), Dean et al.
patent: 4530635 (1985-07-01), Engelbrecht et al.
patent: 4553069 (1985-11-01), Purser
patent: 4565601 (1986-01-01), Kakehi et al.
patent: 4584045 (1986-04-01), Richards
patent: 4647266 (1987-03-01), Coad et al.
patent: 4669226 (1987-06-01), Mandler
patent: 4817556 (1989-04-01), Mears et al.
R. H. Brunner, "Wafer Chuck", IBM Technical Disclosure Bulletin, vol. 17, No. 1, Jun. 1974, p. 84.
Varian Vacuum Division, "Thin Film Rotary Fixturing".

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus for retaining wafers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for retaining wafers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for retaining wafers will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1001261

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.