Coating apparatus – Work holders – or handling devices – Gripper or clamped work type
Patent
1990-03-02
1991-08-20
Woo, Jay H.
Coating apparatus
Work holders, or handling devices
Gripper or clamped work type
118730, 269238, 269254R, 279 1D, B05C 1300
Patent
active
050404849
ABSTRACT:
A device for releaseably holding a workpiece includes a resilient collet which is attached to a base by an elastomeric member. Typically, the collet is an annular ring. Several fingers for holding the workpiece extend from the collet. The fingers are pivoted by actuating a member which elastically deforms the collet and causes the fingers to pivot from a position for engaging the workpiece to a position for releasing the workpiece and vice-versa. In one application, the base is a platen for supporting a wafer in a semiconductor processing system, and a plurality of the holding devices are arranged around the periphery of a rotating disk. A counterweight ring is attached to the collet to counterbalance the moment generated by the centrifugal force of the wafer pressing against the fingers as the disk is rotated.
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Varian Vacuum Division, "Thin Film Rotary Fixturing".
Brick Robert V.
Hertel Richard J.
Holt, Jr. Carl J.
Mears Eric L.
Cole Stanley Z.
Nguyen Khanh P.
Sgarbossa Peter J.
Varian Associates Inc.
Woo Jay H.
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