Coating apparatus – Work holders – or handling devices – Gripper or clamped work type
Patent
1987-05-04
1989-04-04
Beck, Shrive
Coating apparatus
Work holders, or handling devices
Gripper or clamped work type
118730, 269238, 269254R, 279 1D, B05C 1300
Patent
active
048175560
ABSTRACT:
A device for releaseably holding a workpiece includes a resilient collet which is pivotally attached to a base. Several fingers for holding the workpiece extend from the collet. The fingers are pivoted by actuating a member which elastically deforms the collet and causes the fingers to pivot from a position for engaging the workpiece to a position for releasing the workpiece and vice-versa. In one application, the base is a platen for supporting a wafer in a semiconductor processing system and a plurality of such platens and a corresponding plurality of the holding devices are arranged around the periphery of the disk. A counterweight ring is attached to the ring-shaped collet to counter-balance the moment generated by the centrifugal force of the wafer pressing against the fingers as the disk is rotated.
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R. H. Brunner, "Wafer Chuck"; IBM Technical Disclosure Bulletin, vol. 17, No. 1, (Jun. 1974), p. 84.
Brick Robert V.
Hertel Richard J.
Mears Eric L.
Bashore Alain
Beck Shrive
Cole Stanley Z.
Dooher Terrence E.
Fisher Gerald M.
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