Electricity: electrical systems and devices – Electric charge generating or conducting means – Modification of environmental electric charge
Patent
1989-10-13
1991-09-10
Pellinen, A. D.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Modification of environmental electric charge
361216, 361235, H05F 304
Patent
active
050478923
ABSTRACT:
An apparatus for removing static electricity from charged articles existing in a clean space, particularly in a clean room for the production of semiconductor devices, includes an AC ionizer having a plurality of needle-like emitters disposed in a flow of clean air. A discharge end of each emitter is coated with a dielectric ceramic material. Opposite conductors are also included which are respectively positiond apart from each emitter by a predetermined distance. A DC voltage (or voltages) is applied to the opposite conductors. By adjusting the DC voltage (or voltages), the positive and negative ion concentration generated by each emitter is controlled. Further, a bias voltage may be added to the DC to increase the ion concentration.
REFERENCES:
patent: 3337784 (1967-08-01), Lueder
patent: 4642728 (1987-02-01), Unger
patent: 4757422 (1988-07-01), Bossard et al.
patent: 4864459 (1989-09-01), Larigaldie et al.
"Application of Microporous Glass (MPG) for Cleaning Particles in Gas and Liquid"; Swiss Contamination Control 3 (1990) Nr. 4a, pp. 187-190, ICCS90/Zurich, Switzerland 10-14 Sep. 1990, Proceedings vol. I.
10th International Symposium on Contamination Control (ICCCS 90), Zurich, Switzerland, 10-14 Sep. 1990 "Contamination-Fire Ionizer for Static Control in Superclean Rooms", Sakata et al., pp. 60-63.
Okada Takao
Sakata Soichiro
Yoshida Takanori
Gaffin Jeffrey A.
Pellinen A. D.
Takasago Thermal Engineering Co., Ltd.
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