Apparatus for removing small particles from a substrate

Details Apparatus for removing small particles from a substrate Apparatus for removing small particles from a substrate

1988-12-06

1990-10-16

Kashnikow, Andres

Fluid sprinkling, spraying, and diffusing

Rigid fluid confining distributor

Elongated orifice in terminal member

239590, 51320, 134 93, 134198, B05B 100

Patent

active

049628917

ABSTRACT:
Apparatus for removing small particles from a substrate including superimposed plates forming at least two parallel chambers and a film-like member interposed between the plates and adapted to provide flow communication between the chambers to enable fluid carbon dioxide to form a mixture of solid particles and gaseous carbon dioxide which flows out of an ejection port toward the substrate.

REFERENCES:
patent: 2985387 (1961-05-01), Sprang, Jr.
patent: 3623437 (1971-11-01), Lusser
patent: 3790087 (1974-02-01), Banyas et al.
patent: 4806171 (1989-02-01), Whitlock et al.

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