Photocopying – Projection printing and copying cameras – With developing
Reexamination Certificate
2011-06-21
2011-06-21
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
With developing
C355S030000
Reexamination Certificate
active
07965372
ABSTRACT:
A photoresist film removing apparatus includes a reacting chamber, an ozonizer producing a gas supplied to the reacting chamber, and an exhaust system that exhausts the gas from the reacting chamber. A source of a photoresist film-remover is located opposite a stage carrying a substrate covered with photoresist. Photoresist film-remover and the gas are supplied to the substrate through apertures. An electric field may be generated between the source of the photoresist film-remover and the substrate. Alternatively, a centrally located feed tube supplies only one of the gas and the photoresist film-remover through a single aperture and a reservoir discharges the other through apertures. The reservoir surrounds and is sealed to the feed tube. The apparatus may include a container holding a liquid photoresist film-remover and a mixture of the gas and remover is supplied from outside the reacting chamber to the substrate.
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Kashkoush et al., “A Novel Method for Photoresist Stripping Using Ozone-De-ionized Water Chemistry”, IEEE 1997, pp. 81-84.
Kuzumoto Masaki
Miyamoto Makoto
Noda Seiji
Oya Izumi
Leydig , Voit & Mayer, Ltd.
Mitsubishi Denki & Kabushiki Kaisha
Nguyen Hung Henry
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