Brushing – scrubbing – and general cleaning – Electrostatic cleaning
Reexamination Certificate
2007-06-26
2007-06-26
Chin, Randall (Department: 1744)
Brushing, scrubbing, and general cleaning
Electrostatic cleaning
C134S902000
Reexamination Certificate
active
10621441
ABSTRACT:
The apparatus for removing particles in accordance with the present invention is for a processing device including a vacuum container unit having a plurality of chambers in which a predetermined process is performed on a wafer carried in by a conveyer unit in atmosphere. The apparatus comprises a charge neutralizing means for neutralizing charges generated on a surface of the wafer, the charge neutralizing means being mounted in a waiting-accommodation unit which constitutes a part of the conveyer unit, and a charging means for adsorbing particles in the vacuum container unit by electrostatic force, the charging means being mounted in the vacuum container unit.
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Chin Randall
Nixon & Vanderhye P.C.
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