Apparatus for removing organic substance from substrate

Details Apparatus for removing organic substance from substrate Apparatus for removing organic substance from substrate

1986-10-15

1988-07-12

Moore, Chris K.

Brushing, scrubbing, and general cleaning

Machines

With air blast or suction

15312R, 15316R, B08B 302, B08B 502

Patent

active

047560479

ABSTRACT:
An apparatus for removing organic substances from a substrate, including ultraviolet lamps provided above a horizontal hot plate on which a substrate is placed; an ozone blow-off pipe which blows ozone downward, provided at a position appropriately distant from the surface of the hot plate on which the substrate is placed, the ozone blow-off pipe being so arranged as to be reciprocated relative and parallel to the surface of the hot plate.

REFERENCES:
patent: 4407406 (1983-10-01), Norris
patent: 4483040 (1984-11-01), Magee et al.
patent: 4485519 (1984-12-01), Collier
patent: 4500407 (1985-02-01), Boys et al.
patent: 4591044 (1986-05-01), Ogami et al.

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