Gas separation – With nonliquid cleaning means for separating media – Solid agent cleaning member movingly contacts apparatus
Patent
1995-11-29
1997-07-22
Chiesa, Richard L.
Gas separation
With nonliquid cleaning means for separating media
Solid agent cleaning member movingly contacts apparatus
55223, 55431, 95225, 261142, 261155, 261DIG54, 422174, B01D 4706
Patent
active
056499850
ABSTRACT:
Apparatus for removing harmful substances of an exhaust gas discharged from a semiconductor manufacturing process are provided. The apparatus includes a mechanism for: removing at least one of a water-soluble component, a hydrolyzable component and dust contained in the exhaust gas discharged from semiconductor manufacturing equipment by water scrubbing; heating the water-scrubbed exhaust gas to thermally decompose a thermally-decomposable component contained therein; and removing dust generated by the thermal decomposition from the thermally-decomposed exhaust gas by water scrubbing to render the thermally decomposed exhaust gas into a clean exhaust gas.
REFERENCES:
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patent: 4467614 (1984-08-01), Tropeano et al.
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patent: 5277707 (1994-01-01), Munk et al.
patent: 5405445 (1995-04-01), Kumada et al.
patent: 5567215 (1996-10-01), Bielawski et al.
Heat Oxidation Decomposition Type for CVD Equipment Exhaust Gas Removal Equipment KT-1000 (brochure) Sumitomo Seika. Publication is believed to be Jul. of 1994. (Japanese and English Transiations).
Chiesa Richard L.
Kanken Techno Co., Ltd.
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