Apparatus for removing deposited matter from a diffusion tube

Details Apparatus for removing deposited matter from a diffusion tube Apparatus for removing deposited matter from a diffusion tube

1979-11-30

1981-10-13

Bleutge, Robert L.

Cleaning and liquid contact with solids

Apparatus

With alarm, signal, indicating, testing, inspecting,...

134169C, 134171, 134200, B08B 302, B08B 902

Patent

active

042942713

ABSTRACT:
Apparatus for removing deposited matter, such as silicon and contaminants, from the interior of quartz diffusion tubes including an acid holding tank; a quartz-tube support for vertically holding the tube, neck down; a flexible seal for connecting the neck of the tube to the holding tank; an immersion pump and associated tubing for circulating the acid; and a spray head, connected with the pump and tubing, to spray the acid against the inside surface of the quartz tube to clean off the deposited matter. In order to prevent the acid sprayed on the inside surface from forming channels in the silicon or other deposited matter, two groups of nozzles are provided in the spray head--one group with its nozzles arranged at about 30.degree. from vertical, the other group with its nozzles arranged at about 60.degree. from vertical--so that the jets sprayed from each of the two groups are directed 90.degree. from one another; a diverter valve alternately connects the two groups of nozzles to the pump; as the flow of acid is switched from one group of nozzles to the other, the jets of acid are caused to sweep from the direction of one group of nozzles to that of the other, and no channelization is permitted to occur.

REFERENCES:
patent: 1447304 (1923-03-01), Hauk
patent: 3208460 (1965-09-01), Heinicke
patent: 3441035 (1969-04-01), Edwards
patent: 3583413 (1971-06-01), Mertzanis
patent: 3624750 (1971-11-01), Peterson
patent: 3630777 (1971-12-01), Ishizawa et al.
patent: 3645283 (1972-02-01), Cassells
patent: 4064886 (1977-12-01), Heckele
patent: 4224108 (1980-09-01), Takahashi et al.

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