Apparatus for removing covering film

Details Apparatus for removing covering film Apparatus for removing covering film

1986-07-02

1988-05-31

Hornsby, Harvey C.

Cleaning and liquid contact with solids

Apparatus

Miscellaneous

134 7, 134102, B08B 1100

Patent

active

047474211

ABSTRACT:
An apparatus for removing a photo-resist covering from a substrate employs fine solid CO.sub.2 particles that are impacted on the substrate at high velocity to cause abrading of the photo-resist covering in the absence of damage or contamination of the substrate.

REFERENCES:
patent: 3074822 (1963-01-01), Walk et al.
patent: 3089775 (1963-05-01), Lindall
patent: 3545996 (1970-12-01), Duncan
patent: 3611639 (1971-10-01), Ashworth
patent: 3676963 (1972-07-01), Rice et al.
patent: 3702519 (1972-11-01), Rice et al.
patent: 4038786 (1972-08-01), Fong
patent: 4389820 (1983-06-01), Fong et al.

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