Coating apparatus – Work holders – or handling devices
Patent
1982-10-12
1984-05-15
Smith, John D.
Coating apparatus
Work holders, or handling devices
118730, 118723, 118 501, 118729, C23C 1308
Patent
active
044481497
ABSTRACT:
Briefly, the apparatus in accordance with this invention features an energy coaxial feedthrough fix-mounted in the wall of the vacuum chamber for supplying electrical and mechanical energy from sources located externally of the vacuum chamber to within the vacuum chamber. Additionally, the apparatus includes a movable coaxial coupler capable of releasably engaging the coaxial feedthrough and additionally releasably latching a substrate holder. Finally, the apparatus includes a linkage assembly located within the chamber connected to the coupler so that the coupler may be located in a first position proximate an access port in the chamber wall to facilitate quick and convenient loading of a substrate holder and a second position in which the coupler may be connected to the feedthrough for uniformly transmitting electrical and mechanical energy to the substrate holder and the substrates thereon.
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Brown, Jr. William W.
Dahlke Gerhard P.
Lupul Francis T.
International Business Machines - Corporation
Plantz Bernard F.
Smith John D.
Stoffel Wolmar J.
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