Apparatus for relatively positioning a plurality of objects by t

Details Apparatus for relatively positioning a plurality of objects by t Apparatus for relatively positioning a plurality of objects by t

1974-06-17

1976-03-09

Borchelt, Archie R.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250237R, 318640, 356152, G01J 120

Patent

active

039433595

ABSTRACT:
A positioning apparatus comprising marks for position detection which are respectively formed on a plurality of objects, means to cause optical images of the position detecting marks from the respective objects to reach a scanning mechanism, the scanning mechanism scanning the optical images at the same time, a plurality of detectors, each of which consists of a slit and a photoelectric element, the slits being arranged on an identical optical axis so that the optical images of the position detecting marks of the respective objects as scanned by the scanning mechanism may be detected respectively and individually, and a driving device which moves one of the plurality of objects on the basis of signals from the detectors, to effect the relative positioning of the plurality of objects.

REFERENCES:
patent: 3683195 (1972-08-01), Johannsmeier
patent: 3739247 (1973-06-01), Yamaguchi et al.
patent: 3744914 (1973-07-01), Gonda
patent: 3796497 (1974-03-01), Mathisen et al.
patent: 3809987 (1974-05-01), Suhr et al.

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