Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2006-06-27
2006-06-27
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S075000, C430S005000
Reexamination Certificate
active
07068347
ABSTRACT:
Pellicles separated by a distance sufficient to allow a purge gas help repair damage to at least one of the pellicles caused by exposure to an incident radiation and allowing at least a minimum amount of radiation to reach a semiconductor wafer sufficient to perform a desired photolythography process. Moreover, the two pellicles separated by a sufficient distance such that a dispersed purge gas dispersed between the pellicles will not absorb more than an amount of energy from the incident radiation so as to prevent a desired amount of the radiation to reach a semiconductor wafer located a certain distance away from the pellicles.
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Mathews Alan
Metzger Erik M.
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