Apparatus for recharging of silicon granules in a czochralski si

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

117 18, 117202, 117214, C30B 3500

Patent

active

058688358

ABSTRACT:
A recharger system including a feeder and a feed conduit recharge polycrystalline silicon granules into a crucible after a run or operation of growing a single crystal silicon rod by the Czochralski method, thereby to prepare for a next run of crystal growing. The amount of holdup or backed-up supply of the silicon granules in the feed conduit is detected by a sensor provided on the feed conduit. A smooth and high-rate feed of the silicon granules is ensured by controlling the feed rate of the silicon granules from the feeder to the feed conduit and/or a descending velocity of the crucible by signals generated in the sensor as a function of the amount of the holdup or backed-up supply in the feed conduit.

REFERENCES:
patent: 5492078 (1996-02-01), Alterkruger et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus for recharging of silicon granules in a czochralski si does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for recharging of silicon granules in a czochralski si, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for recharging of silicon granules in a czochralski si will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1945690

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.