Apparatus for real-time contamination, environmental, or...

Details Apparatus for real-time contamination, environmental, or... Apparatus for real-time contamination, environmental, or...

2011-04-19

2011-04-19

Kim, Peter B (Department: 2882)

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Detailed holder for original

C355S030000

Reexamination Certificate

active

07929117

ABSTRACT:
An apparatus for real-time contamination, environmental, or physical monitoring of a photomask. The apparatus includes a photomask having a patterned region configured to correspond to features of an integrated circuit and a sensor physically coupled with the photomask. The sensor is configured to monitor an attribute related to the photomask. Attributes monitored by the sensor may include chemical contamination, temperature changes, humidity changes, acceleration, shock, vibration, optical flux through the photomask, electrostatic discharge environment of the photomask, particulates, and pressure.

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patent: 2006133411 (2006-05-01), None

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