Apparatus for rapid phase imaging interferometry and method ther

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356349, G01B 902

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active

059952237

ABSTRACT:
The apparatus performs phase imaging interferometry on a test medium with spatially varying optical length. The apparatus uses a polarization based phase shift element in either the probe or reference arm of the interferometer to simultaneously generate both the conventional in-phase spatial interferogram of the test medium, and a quadrature interferogram which is ninety degrees out of phase with the conventional interferogram at all image positions, allowing a reconstruction of the test medium's interferometric phase image over 0 to 2.pi. radians. In contrast to the prior art, the present invention accomplishes the phase shifting operation in a single interferometer stage, using a polarizing beam splitter which accomplishes polarized seggregation of the interferometer output beam. The apparatus has high resistance to vibrations, instability and misalignment errors.

REFERENCES:
patent: 5365065 (1994-11-01), Power
patent: 5619325 (1997-04-01), Yoshida
R. Smythe / R. Moore, Instantaneous phase measuring interferometry Optical Engineering 23(4), 361-364, Jul., 1984.
D.-C. Su, L. -H. Shyu "A new type of polarization phase shifter for phase shifting interferometry" Optik 90, No. 2 (1992) 53-56, May 6, 1991.

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