Apparatus for quality film formation

Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive

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118641, 118326, B05C 500, B05C 1500

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active

043076815

ABSTRACT:
Methods and apparatus are provided for forming films of materials which are component layers of solar energy conversion devices, e.g. photovoltaic cells and heat collector panels. A selected substrate, generally glass, is heated while being sprayed with solutions which react on the heated surface to form a particular film. Films of SnO.sub.x and CdS are particularly produced. According to the present invention, a thermal energy input gradient is provided to approximate the energy loss gradient during the spray process. Radiative heaters provide a rapid resupply of energy to the substrate and, in some instances, directly to the film forming surface. Temperature detectors, such as thermocouples, monitor substrate temperature to provide the radiative energy input needed for substantial temperature uniformity.

REFERENCES:
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patent: 3264082 (1966-08-01), Golightly
patent: 3293020 (1966-12-01), Sleighter
patent: 3515854 (1970-06-01), Williams
patent: 3744985 (1973-07-01), Peternel
patent: 3880633 (1975-04-01), Jordan et al.
patent: 4119426 (1978-10-01), Kelly

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