Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Waste gas purifier
Patent
1997-09-02
1999-05-04
Dority, Carroll B.
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
Waste gas purifier
422172, B01D 5000
Patent
active
059002174
DESCRIPTION:
BRIEF SUMMARY
The invention relates to an apparatus for purifying waste gases, particularly waste gases from CVD (chemical vapor deposition), plasma etching or similar processes, with at least one combustion space, which is in a vertical arrangement within an outer pipe and is limited at the top by an umbrella-like cover, and an internally or externally mixing burner, the combustion gas nozzles of which protrude into the combustion space, combustion gas, oxygen or air and waste gas being supplied to the burner, as well as to means for supplying and discharging oxidizing agents and/or absorbents to a scrubbing space above the combustion space.
The purification of such waste gases usually takes place in two steps, in that the waste gases initially are combusted and subsequently purified in a scrubber. The combustion of the waste gases or their oxidation takes place in these cases with the help of gas-operated burners within a combustion chamber.
The EP 0 346 893 B1 discloses such an apparatus for purifying waste gases, which consists of a basic body of circular cross section, which is essentially closed at the bottom and open at the top. This basic body consists of a cylindrical outer wall and an inner wall, which is disposed concentrically to the outer wall and forms the boundary of a combustion chamber. A burner for combusting the waste gases, which are supplied together with the combustion gas to the burner, protrudes from below into this basic body into the combustion chamber. At the top, the extent of the combustion chamber is limited by a splash guard, above which, a scrubbing or flushing chamber is located. In this flushing chamber, there is a centrally disposed nozzle, with the help of which a spray cone of a flushing material is produced, with which aerosols and solids components are flushed out of the combusted waste gas. By means of the splash guard, the flushing agent is prevented from being sprayed into the combustion chamber and, with that, onto the burner or into the flame.
The residues, flushed out, are conveyed downwards along the inside of the cylindrical outer wall and discharged through a drain the basic body.
It has proven to be a disadvantage of this apparatus for purifying waste gases that the purification processes of the apparatus itself are very expensive and that in particular, there are difficulties with cleaning the combustion space. In addition, contamination of the combustion gas nozzles and of the waste gas nozzle is almost unavoidable, so that regular maintenance of the burner is required to assure reliable operation.
It is therefore an object of the invention to provide an apparatus for purifying waste gases, which can be manufactured cost-effectively and by means of which the disadvantages of the state of the art can be avoided.
This objective is accomplished by an apparatus for purifying waste gases of the initially mentioned type owing to the fact that the burner is fastened centrally in the cover, that the burner has burner nozzles and at least one nozzle for supplying waste gas, which are directed vertically downward in the combustion space and that the reaction products, produced by the combustion process, are passed along the inside of the outer pipe into the scrubbing space, that the basic body forms a boundary at the lower end of the combustion space, that, within the outer pipe, an inner pipe is provided, which extends as far as into the basic body and ends at a distance above the bottom of the basic body, that the reaction products, formed by the combustion process, are passed along the interior side of the outer pipe from the basic body upwards into the scrubbing space and that the absorbent, after it is dispersed in the scrubbing space and enriched with the reaction products, is discharged along the inner side of the outer pipe over the basic body.
With this easily realized apparatus for purifying waste gases, a higher availability, as well as a significant improvement in the apparatus for purifying waste gases are attained on the one hand. In particular, an effect of the com
REFERENCES:
patent: 5123836 (1992-06-01), Yoneda et al.
Autenrieth Hans
Fabian Lutz
Hartung Rolf
Kroedel Gunter
Resch Dietmar
Centrotherm Elektrische Anlagen GmbH & Co.
Dority Carroll B.
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