Apparatus for purifying laser gas

Details Apparatus for purifying laser gas Apparatus for purifying laser gas

1991-03-15

1992-08-04

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

H01S 322

Patent

active

051366053

ABSTRACT:
An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liquid nitrogen (12).

REFERENCES:
patent: 4601040 (1986-07-01), Andrews et al.
patent: 4674092 (1987-06-01), Cannon
patent: 4803693 (1989-02-01), Schramm
patent: 4977749 (1990-12-01), Sercel
patent: 5014281 (1991-05-01), Hecht et al.

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