Apparatus for purifying laser gas

Details Apparatus for purifying laser gas Apparatus for purifying laser gas

1994-06-09

1995-07-04

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

H01S 322

Patent

active

054307520

ABSTRACT:
An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liqid nitrogen (12).

REFERENCES:
patent: 4601040 (1986-07-01), Andrews et al.
patent: 4977749 (1990-12-01), Sercel
patent: 5001721 (1991-03-01), Ludewig et al.
patent: 5005181 (1991-04-01), Yoshioka et al.
patent: 5073896 (1991-12-01), Reid et al.
patent: 5136605 (1992-08-01), Basting et al.

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