Apparatus for providing consistent registration of semiconductor

Details Apparatus for providing consistent registration of semiconductor Apparatus for providing consistent registration of semiconductor

1992-01-24

1993-01-19

Watson, Robert C.

Work holders

Relatively movable jaws

Means to actuate jaw

269305, 269903, B25B 120

Patent

active

051801507

ABSTRACT:
An apparatus (10) for providing a consistent registration of a semiconductor wafer undergoing process work includes a platen (38) upon which a surround (14) is registered. The surround registers to the platen (38) by matching two pins (42), (40) that protrude from the platen (38) to a hole (44) and a notch (46) in the surround (14), respectively. A first registration surface (16) for registering a flat (20) of a semiconductor wafer (12) is permanently mounted to the surround (14). A second registration surface (18) for registering a point (24) on the circumference of the semiconductor wafer (12) is permanently mounted to the surround (14). A third, adjustable registration surface (26) also registers to a point (28) on the circumference of the wafer (12). This third registration surface (26) is springloaded to accommodate for slight diameter variations in successively processed semiconductor wafers, and to provide a force to hold the wafer (12) in place.

REFERENCES:
patent: 4582309 (1986-04-01), Moxon et al.
patent: 4703920 (1987-11-01), Grabbe et al.
patent: 4970772 (1990-11-01), Steere
patent: 4971676 (1990-11-01), Doue et al.
IBM Technical Disclosure Bulletin, "Wafer-Source Boat for Capsule Diffusion", Marsh et al., Nov., 1970.

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