Apparatus for providing consistent, non-jamming registration of

Details Apparatus for providing consistent, non-jamming registration of Apparatus for providing consistent, non-jamming registration of

1996-02-20

1997-12-23

Bueker, Richard

Metal working

Barrier layer or semiconductor device making

269305, 269903, B23Q 318

Patent

active

057002975

ABSTRACT:
An apparatus (40) for providing consistent, non-jamming registration of a notched semiconductor wafer (46) undergoing multiple sequential process work includes a plate (41) upon which the wafer (46) is laid flat. The notch (45) of the notched semiconductor wafer (46) is registered against a first roller (42) that is fixedly mounted to the plate (41). A second roller (43), also fixedly mounted to the plate (41), registers a first point (47) along the circumference of the wafer (46). A third roller (48) is fixedly mounted to a bracket (50) that is movable approximately along the radius of the wafer (46). A force (52) is applied to this bracket (50) resulting in the third roller (48) applying a force against the wafer (46). This resultant force, coupled with the rotating capability of the rollers (42,43,48), allows the wafer (46) to rotate into a proper registration position.

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