Apparatus for providing consistent, non-jamming registration of

Details Apparatus for providing consistent, non-jamming registration of Apparatus for providing consistent, non-jamming registration of

1992-08-28

1994-10-04

Breneman, R. Bruce

Metal working

Barrier layer or semiconductor device making

269305, 269903, B23Q 318

Patent

active

053522494

ABSTRACT:
An apparatus (40) for providing consistent, non-jamming registration of a semiconductor wafer (46) undergoing process work includes a plate (42) upon which the wafer (46) is laid flat. A flat (45) of the wafer (46) is registered against two rollers (43') that are fixedly mounted to the plate (42). A third roller (43), also fixedly mounted to the plate (42), registers a first point (47) along the circumference of the wafer (46). A fourth roller (48) is fixedly mounted to a bracket (50) that is movable approximately along the radius of the wafer (46). A force (54) is applied to this bracket (50) resulting in the fourth roller (48) applying a force against the wafer (46). This resultant force, coupled with the rotating capability of the rollers (43, 43', 48), allows the wafer (46) to rotate into a proper registration position. A second embodiment (60) that incorporates essentially these same force and rotation dynamics through the use of flexures (64, 66, 68) is also disclosed.

REFERENCES:
patent: 4189230 (1980-02-01), Zasio
patent: 4350866 (1982-09-01), Zasio et al.
patent: 4376482 (1983-03-01), Wheeler et al.
patent: 4621797 (1986-11-01), Ziegenfuss
patent: 4943148 (1990-07-01), Mondragon et al.
patent: 5180150 (1993-01-01), Prusak et al.
Patent Abstracts of Japan, vol. 7, No. 272 (E-214) (417).

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