Apparatus for providing a purified resource in a manufacturing f

Details Apparatus for providing a purified resource in a manufacturing f Apparatus for providing a purified resource in a manufacturing f

1996-10-09

1999-10-26

Bushey, C. Scott

Gas separation

Combined or convertible

In environmental air enclosure

55420, 55424, 55467, 96400, 454187, B01L 104, F24F 706

Patent

active

059720603

ABSTRACT:
A method and apparatus provides a resource capable of affecting the manufacture of a product to a bay and a chase. Clean resource is supplied to the bay where it is used to affect the manufacture of a product in one or more steps highly sensitive to contaminants in the resource. The resource contaminated by the manufacture of the product is then sent to a chase where it is further used to affect the manufacture of the same or a different product in steps that are less sensitive to the contamination of the resource. Because the bay is most sensitive to contaminants in the resource, the impurified resource received at the chase may not adversely affect the manufacture of products in the chase and thus, supplying a clean resource to the chase is unnecessary.

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United States Patent and Trademark Office, PCT Preliminary Examination Report Nov. 3, 1998.
United States Patent and Trademark Office, PCT Written Opinion, Jul. 1, 1998.

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