Optical: systems and elements – Polarization without modulation – Polarization by birefringence
Reexamination Certificate
2008-01-29
2008-01-29
Lavarias, Arnel (Department: 2872)
Optical: systems and elements
Polarization without modulation
Polarization by birefringence
C359S490020, C359S506000, C355S071000
Reexamination Certificate
active
07324280
ABSTRACT:
A polarization pattern assembly produces a polarization pattern. In an embodiment, a polarization pattern assembly includes a frame that supports a polarization pane in a central region of the frame. The polarization pane changes the polarization direction of light incident upon the polarization pane. Different polarization patterns in a pupil of a polarized illuminator can be generated.
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ASML Holding N.V.
Lavarias Arnel
Sterne Kessler Goldstein & Fox P.L.L.C.
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