Optical: systems and elements – Polarization without modulation – Polarization by birefringence
Reexamination Certificate
2011-03-29
2011-03-29
Lavarias, Arnel C (Department: 2872)
Optical: systems and elements
Polarization without modulation
Polarization by birefringence
C359S490020, C359S506000, C355S071000
Reexamination Certificate
active
07916391
ABSTRACT:
A polarization pattern assembly for use in an illuminator and an apparatus for providing at least one polarization pattern in a pupil of an illuminator for a lithography system are provided. A polarization pattern assembly for use in an illuminator having a pupil includes a frame (110) and at least one polarization pane (102, 102a,102b) coupled to the frame (110), the polarization pane (102, 102a,102b) changing a direction of polarization of light passing therethrough, whereby at least one polarization pattern is obtained across the pupil of the illuminator, and wherein the polarization pane (102, 102a,102b) includes an optically active material.
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Albert Michael
Fiolka Damian
ASML Holding NV
Cahn & Samuels LLP
Carl Zeiss SMT GmbH
Lavarias Arnel C
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