Apparatus for protecting a reference mark used in exposure equip

Photocopying – Projection printing and copying cameras – Step and repeat

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

355 67, G03B 2742, G03B 2754

Patent

active

059780681

ABSTRACT:
A reference mark member used in exposure equipment is protected from being contaminated. A cover assembly, which includes a shutter-like cover, can be selectively opened and closed over the reference mark member to protect the same. A driving system drives the cover between its open and closed positions. An electronic controller controls the operation of the driving system based on the operating state of the equipment. The cover assembly may also include an annular support for the cover which extends around the reference mark member to offer further protection for the same. Protecting the reference mark member prevents the contamination of the reference mark which could lead to an error in an alignment task for which the reference mark is used.

REFERENCES:
patent: 3245794 (1966-04-01), Conley
patent: 3844655 (1974-10-01), Johannsmeier
patent: 5521036 (1996-05-01), Iwamoto et al.
patent: 5675402 (1997-10-01), Cho
patent: 5760881 (1998-06-01), Miyazaki

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus for protecting a reference mark used in exposure equip does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for protecting a reference mark used in exposure equip, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for protecting a reference mark used in exposure equip will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2142996

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.