Photocopying – Contact printing – Light boxes
Patent
1982-07-21
1983-07-05
Corbin, John K.
Photocopying
Contact printing
Light boxes
355 43, G02B 1708
Patent
active
043914942
ABSTRACT:
The apparatus forms one-to-one reticle images on a wafer. The apparatus includes means for holding a reticle containing an image pattern corresponding to the size of the desired wafer pattern. An illumination system substantially uniformly illuminates the reticle pattern. A one-to-one stationary projection optical system projects an image of the reticle pattern onto a predetermined focal plane. Suitable means such as a vacuum chuck holds the wafer. An alignment system steps and orients a wafer chuck to register markings on the individual sides of the wafer with corresponding markings on the reticle. A fluid servo system acts on the chuck to hold at least a portion of the wafer in the predetermined focal plane of the projection optical system.
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Corbin John K.
FitzGerald Thomas R.
Gass Rebecca D.
General Signal Corporation
Snee, III Charles E.
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