Photocopying – Projection printing and copying cameras – Focus or magnification control
Patent
1982-07-29
1984-04-24
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Focus or magnification control
125 35, 269 21, 350442, 355 43, 355 54, 356152, 356401, G03B 2752
Patent
active
044444923
ABSTRACT:
The apparatus forms one-to-one reticle images on a wafer. The apparatus includes means for holding a reticle containing an image pattern corresponding to the size of the desired wafer pattern. An illumination system substantially uniformly illuminates the reticle pattern. A one-to-one stationary projection optical system projects an image of the reticle pattern onto a predetermined focal plane. Suitable means such as a vacuum chuck holds the wafer. An alignment system steps and orients a wafer chuck to register markings on the individual sides of the wafer with the projected image of corresponding markings on the reticle. A fluid servo system acts on the chuck to hold at least a portion of the wafer in the predetermined focal plane of the projection optical system.
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FitzGerald Thomas R.
General Signal Corporation
Snee, III Charles E.
Vande Sande George
Wintercorn Richard A.
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