Apparatus for projecting a pattern into an image plane

Details Apparatus for projecting a pattern into an image plane Apparatus for projecting a pattern into an image plane

2008-03-04

2008-03-04

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S071000, C355S053000

Reexamination Certificate

active

11339844

ABSTRACT:
An improvement of the imaging quality with simultaneous transfer of line-space gratings and peripheral structures including a MUX space is achieved using a quadrupole illumination whose poles are formed in elongate fashion and whose longitudinal axes are arranged perpendicular to the orientation of the lines of the line-space grating arranged on a mask. The structure imaging of the line-space grating is improved with regard to contrast, MEEF, and process window, while the geometrical fidelity of the peripheral structure, in particular of the MUX space, is stabilized over a wide depth of field range.

REFERENCES:
patent: 6045976 (2000-04-01), Haruki et al.
patent: 6704092 (2004-03-01), Shiraishi
patent: 2002/0036758 (2002-03-01), De Mol et al.
patent: 2004/0139418 (2004-07-01), Shi et al.
patent: 2005/0007573 (2005-01-01), Hansen et al.
“Alternating Phase-Shifting Mask”, pp. 117-121, 2001.

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