Apparatus for producing ultrapure water

Details Apparatus for producing ultrapure water Apparatus for producing ultrapure water

1993-08-02

1995-01-31

Nessler, Cynthia L.

Liquid purification or separation

With gas-liquid surface contact means

With separator

210259, 210266, 210631, 210900, C02F 302

Patent

active

053856643

ABSTRACT:
In an ultrapure water production apparatus formed of a source water pretreatment system, a primary pure water system, and a secondary pure water system, the source water pretreatment system includes a biological processing device.

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