Apparatus for producing thin-film electrolyte

Details Apparatus for producing thin-film electrolyte Apparatus for producing thin-film electrolyte

2005-05-03

2005-05-03

Maples, John S. (Department: 1745)

Metal working

Means to assemble or disassemble

Means to assemble electrical device

C029S623500, C429S322000, C429S304000, C429S162000

Reexamination Certificate

active

06886240

ABSTRACT:
An apparatus for producing a thin film electrolyte is provided wherein a volatile lithium-containing precursor and a volatile phosphate-containing precursor are mixed into a plasma generated from a plasma source. The mixture is then deposited upon a substrate. The apparatus has a plasma source (13) having a primary plenum (16) and a secondary plenum (23). The primary plenum is in fluid communication with a source of nitrogen gas (47) and a source of hydrogen gas (51). The secondary plenum is in fluid communication with a first bubbler (31) and a second bubbler (38).

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