Apparatus for producing soft X-rays using a high energy laser be

Details Apparatus for producing soft X-rays using a high energy laser be Apparatus for producing soft X-rays using a high energy laser be

1985-12-26

1988-02-02

Howell, Janice A.

X-ray or gamma ray systems or devices

Source

378143, H01J 3500

Patent

active

047232625

ABSTRACT:
The soft X-ray apparatus of the present invention includes a vessel at low pressure or a vacuum in which a liquid target material, preferably mercury, is discharged in the form of a series of discontinuous droplets. The flow of the droplets of liquid target material is controlled by a control device, and synchronized with a high energy pulse beam, preferably a high energy laser pulse beam, provided by a laser device through a window in the vessel. In the preferred embodiment, this laser device also is controlled by the control device so that the laser pulse beam impinges a droplet of mercury inside the vessel to produce plasma to thereby generate soft X-rays. The droplets of mercury are sized to correspond to the size of the laser pulse beam at the point where the laser pulse beam impinges the droplet of mercury to maximize the strength of the soft X-rays and efficiently utilize the power of the high energy laser pulse beam. The soft X-rays exit the vessel through additional windows for subsequent use. A recovery mechanism is connected to the vessel to cover any unused liquid target material so that this material can be recirculated.

REFERENCES:
patent: 3882312 (1975-05-01), Kepros et al.
patent: 4281269 (1981-07-01), Ledley
High Brightness Laser/Plasma Source for High Throughput Submicron X-Ray Lithography--Alan L. Hoffman, George F. Albrecht, Edward A. Crawford, Feb. 1985.
Submicron X-Ray Lithography Using Laser-Produced Plasma as a Source--B. Yaakobi, H. Kim, and J. M. Soures, Oct. 1983.

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