Apparatus for producing semiconductor device

Details Apparatus for producing semiconductor device Apparatus for producing semiconductor device

1988-06-15

1990-06-19

Hoag, Willard

Plastic article or earthenware shaping or treating: apparatus

Including ventilating type hood or chamber encasing a...

425116, B29C 4336, B29C 4356

Patent

active

049349201

ABSTRACT:
An apparatus for producing a semiconductor device includes a dust-proof cover which covers a dust-generating portion in the apparatus such as a mold for effecting resin-molding of the semiconductor device composed of a lead frame and semiconductor chips wire- and die-bonded thereto, and a dust-collecting device for collecting dust which is suspended by the air inside the dust-proof cover.

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