Apparatus for producing planar plasma using varying magnetic pol

Details Apparatus for producing planar plasma using varying magnetic pol Apparatus for producing planar plasma using varying magnetic pol

1994-03-17

1995-07-25

Breneman, R. Bruce

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118723MA, 20429816, C23F 102

Patent

active

054358817

ABSTRACT:
A plasma generation system comprises a two-by-two or larger array of alternating magnetic poles set proximate to an insulating window in a chamber containing a process gas. The magnetic poles are ferromagnetic core coils driven by a radio frequency power source at sufficient energies to generate a plasma within the process gas chamber. The magnetic poles are included in ferromagnetic core coils that are wired to the radio frequency power source such that each magnetic pole is surrounded equally in the plane of the insulating window by adjacent magnetic poles of opposite magnetic polarity and uniform magnitudes. In a two-by-two array, the two sets of opposite corners have opposite magnetic polarities.

REFERENCES:
patent: 4947085 (1990-08-01), Nakanishi
patent: 4948458 (1990-08-01), Ogle
patent: 5122251 (1992-01-01), Campbell
patent: 5198725 (1993-03-01), Chen
patent: 5277751 (1994-01-01), Ogle

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