Apparatus for producing oxidation protection coatings for polyme

Details Apparatus for producing oxidation protection coatings for polyme Apparatus for producing oxidation protection coatings for polyme

1985-07-31

1986-08-05

Niebling, John F.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

204192C, 204192D, C23C 1446

Patent

active

046041818

ABSTRACT:
A polymeric substrate 10 is coated with a metal oxide film 22 to provide oxidation protection in low earth orbital environments. The film contains about 4 volume percent polymer to provide flexibility.
A coil of polymer material 30, 42 moves through an ion beam 14 as it is fed between reels. The ion beam first cleans the polymer material surface and then sputters the film material from a target 24 onto this surface.

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J. L. Vossen et al., Thin Film Processes, Academic Press, New York, 1978, pp. 189-198, 515.

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