Coating apparatus – Gas or vapor deposition – Running length work
Patent
1987-07-10
1989-09-19
Morgenstern, Norman
Coating apparatus
Gas or vapor deposition
Running length work
118715, 55100, 209215, 2092231, 15DIG13, C23C 1600, B03C 100
Patent
active
048671010
ABSTRACT:
Contaminant magnetic dust particles and flakes generated during the thin film coating of a substrate 9 in a vacuum chamber 1 are gravitationally collected in catch pans or troughs 8 disposed below the deposition zones. Magnets 10 are provided under the bottoms of the pans to enhance the attraction and retention of the particles. The contaminants may alternatively or additionally be removed directly from an upper surface of the substrate web by sandwiching one or more of its horizontal conveyance runs between a pair of magnets 22, 23, with the pole face area of the lower magnet being larger than that of the upper one.
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Nagao Makoto
Nahara Akira
Yamanaka Fusao
Fuji Photo Film Co. , Ltd.
Morgenstern Norman
Padgett Marianne
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