Coating apparatus – Immersion or work-confined pool type – Floating film or layer of coating material
Patent
1998-05-29
2000-03-14
Bareford, Katherine A.
Coating apparatus
Immersion or work-confined pool type
Floating film or layer of coating material
4274343, B05C 302
Patent
active
060367784
ABSTRACT:
The present invention provides an apparatus for producing a Langmuir-Blodgett film including a water bath having a spread region for spreading a material for forming a single molecular film on a liquid surface, a compression region for compressing the material spread by the spread region to form a single molecular film, and a lamination region for laminating the single molecular film formed by the compression region on a substrate. The apparatus further includes a first flow path for discharging a liquid, which flows from the spread region of the water bath, to the outside of the water bath through the compression region and the lamination region, a first valve for controlling the amount of the liquid discharged through the first flow path, a second flow path for discharging the liquid, which flows from the spread region of the water bath, from the boundary between the compression region and the lamination region through the compression region, and a second valve for controlling the amount of the liquid discharged through the second flow path.
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patent: 5512326 (1996-04-01), Albrecht et al.
Nitsch, et al.; Connective Compression . . . Insoluble Films, Thin Solid Films, vol. 178 (1989) pp. 145-155 (no month date).
Peterson, et al.; "A New Model for . . . Film Layers", Thin Solid Films, vol. 109 (1983) pp. 371-378 (no month date).
Daniel, et al.; "Effect of Surface Flow . . . Films", J. Mol. Electr. vol. 1, (1985) pp. 97-104 (no month date).
Sugi, et al.; "Vertical Dipping Method . . . Films," Thin Solid Films, vol. 178 (1989) pp. 157-164 (no month date).
Albrecht, et al.; "Control of the homogeneity . . . in the Monolayer", Thin Solid Films, vol. 221 (1992) pp. 276-280 (no month date).
Albrecht, et al.; "Construction and use of LB . . . pilot production," Thin Solid Films, vols. 284-285 (1996) pp. 152-156 (no month date).
Albrecht Otto
Matsuda Hiroshi
Bareford Katherine A.
Canon Kabushiki Kaisha
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