Apparatus for producing diamondlike carbon flakes

Details Apparatus for producing diamondlike carbon flakes Apparatus for producing diamondlike carbon flakes

1984-11-05

1986-01-21

Andrews, R. L.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

204192C, 219121PL, 219121PM, 219121PQ, 219121PR, 219121PG, 219121P, 219121EE, 219121EM, 427 38, 427 39, 427 34, 427 35, C23C 1400

Patent

active

045656185

ABSTRACT:
A vacuum arc between a spot 42 at the face of a graphite cathode 30 and a graphite anode 32 produces a beam 28 of carbon ions and atoms. This beam deposits a carbon coating on an ion beam sputtered target to produce diamondlike carbon flakes.
A graphite tube 40 encloses the cathode, and electrical isolation is provided by an insulating sleeve 38. The tube 40 forces the vacuum arc spot to be confined to the surface on the outermost end of the cathode.
Without the tube 40 the arc spot will wander to the side of the cathode. This spot movement results in low rates of carbon deposition, and the properties of the deposited flakes are more graphitelike than diamondlike.

REFERENCES:
patent: 3904505 (1975-09-01), Aisenberg
patent: 4386258 (1983-05-01), Akashi et al.
patent: 4490229 (1984-12-01), Mirtich et al.
"Gaseous Conductors", by J. D. Cobine, Dover Publications, 1941, pp. 300-303, 596-597.

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